A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion

Spatial atomic layer deposition (SALD) is a leading atmospheric-pressure, high-throughput route to industrial ALD, but design and control are limited by the cost of predicting surface coverage: high-fidelity CFD is far too slow for operating-window scans, while analytic models miss transport modulation such as the gas curtain. We present a physics-chemistry-informed neural network (PCINN), a hybrid surrogate with CFD-level accuracy at real-time speed: a query returns coverage in about 7 ms, roughly 5x10^4 times faster than a CFD solve, reaching a test R^2_log = 0.998 (leave-one-out R^2_raw = 0.974) from only 30 training cases spanning four orders of magnitude in coverage. The architecture is not a black box: a small network learns only the operating-condition to near-wall concentration closure, while the known surface kinetics is a hard-coded, trainable chemistry layer integrated along the substrate trajectory. This single-scalar bottleneck keeps it accurate under sparse data, interpretable and invertible. We add a full identifiability analysis (Fisher information, profile likelihood). The adsorption energy E_ads and desorption rate k_des are robustly identifiable; k_ads is not separately identifiable at a single temperature (only k_ads*c_wall is). Across four temperatures the prefactor nu and E_ads bind along a weakly identifiable degeneracy valley of slope 0.065 eV/decade, derived analytically as k_B T_eff ln(10) and turned into a reliability diagnostic: a seven-chemistry mismatch matrix shows it is invariant under any single-Arrhenius mismatch and shifts only when a second thermally activated process appears, so a slope departure flags unmodelled site heterogeneity. Data come from simulation with known ground truth inverted by the same kinetic form, so the study verifies pipeline self-consistency and the identifiability boundary, not real parameters.

Identifiability Limits of Physics-Informed Inference for Spatial Stochastic Dynamics from Static Snapshots

Despite increasing scale and resolution, many biological measurements remain destructive, revealing only spatial information rather than the dynamics it encodes. By combining flexible representations with mechanistic constraints, physics-informed machine learning offers a promising route to inferring these dynamics from static snapshots. Motivated by subcellular imaging of gene expression, we ask when a static spatial pattern of molecules can identify spatially varying diffusivity, creation, destruction, and boundary exchange, and how different inference schemes perform on the task. A structural identifiability analysis shows that distributed sources are non-identifiable, whereas a point source such as a transcription site can restore identifiability. These limits are further shaped by seemingly innocuous modeling choices: the boundary conditions, the spatial regularity of the underlying dynamics, and even the stochastic calculus convention. We then adapt several physics-informed schemes, differing in how they represent the solution and enforce the governing equations, and demonstrate effective inference from a single snapshot. Physics-informed approaches can thus recover spatial heterogeneities of biological dynamics from static data, but their use should be accompanied and guided by careful identifiability analysis for meaningful interpretation of the results.